| 摘要 |
PURPOSE:To make the attainment of a superhigh vacuum easy contriving to remove a gas load due to a conventional chain by using a metal flat belt and a belt pulley in the driving transmission means of a substrate transferring device. CONSTITUTION:As the driving force transmission means of molecular beam epitaxial equipment, a stainless steel flat belt 13 which is connected to both the ends of a truck 5 and is made a closed loop through stainless steel belt pulleys 12, 12' and a tension pulley 14 is used. When the belt pulley 12 is rotated by driving force transmission means 4, the flat belt 13 of the closed loop is circulated through the belt pulley 12' and the tension pulley 14 and the truck 5 is moved straight to the direction shown by an arrow. Since the stainless steel flat belt 13 is used for driving force transmission means, the surface area is smaller than that for a conventionally used chain 3 and no closed space is made whereby a gas load for a vacuum pump can be reduced from that for a chain driven device. |
