| 摘要 |
PURPOSE:To eliminate the need for an external electric power source by forming a thin film resistor for detecting strain and a semiconductor device for supplying photovoltaic force to the thin film resistor on the same substrate. CONSTITUTION:Light is irradiated to an amorphous solar battery 12 through the glass substrate 11 and transparent conductive film layer 16. The photovoltaic force generated in a battery 12 by the light irradiated thereto is supplied through connecting electrodes 14, 15 to an amorphous silicon film 13. The voltage between the terminals of the film 13 changes when the resistance value of the film 13 changes with the strain applied thereto. If such voltage is taken out of a terminal electrode 14a formed to the electrode 14 and a terminal electrode 15a formed to the electrode 15, the strain exerted to the film 13 can be detected. The need for the external power source is thus eliminated.
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