| 摘要 |
PURPOSE:To perform the measurement of the shape of a surface highly accurately, by inclining a sample to be measured along a plane including the measuring direction of the shape of the surface and the light axis of measuring light with respect to the light axis of the measuring light, increasing the amount of displacement with respect to the direction of the light axis, and increasing the number of interference fringes. CONSTITUTION:After the end of the machining of the central axis or contacting surface 2 of a chip 1, the chip is inclined at an angle theta with respect to a light axis y' of measuring light along a plane including a reference central axis O, which is to become the central axis after said machining, and an axis X. The angle is selected so that the amount of total displacement D at a surface to be measured, i.e., the projected part of the measuring light at the contacting surface 2, becomes the maximum value. Then an interference pattern, i.e., the number of the interference fringes, is increased to the large extent. Namely, 20-30 pieces of the interference fringes are obtained at the portion, where, e.g., about four pieces of the interference fringes are obtained before. Thus signal processing by a photoelectric conversion means 17 such as an optical camera and a video camera can be performed. Therefore, the shape of the surface can be measured highly accurately. |
