| 摘要 |
PURPOSE:To obtain diamond parts to which a conductive film having high mechanical strength and excellent wear resistance is securely stuck by sticking a metallc layer to at least a part of the surface of diamond and providing a layer consisting of any among the nitride, carbide and silicide of said metal thereon. CONSTITUTION:A metallic film 12 consisting of a metal such as Ti, Ta, Hf, W, Zr, Cr, Ni or the like or the intermetallic alloy thereof is formed by sputtering, etc. on a diamond substrate 11. The surface of the substrate 11 is roughened to 0.01-0.1mum surface roughness by sputter etching prior to the formation of said film to increase the adhesion strength according to need. A film 13 consisting of any among the nitride, carbide and silicide of said metal is formed on the film 12 by reactive sputtering, etc. |
