| 摘要 |
PURPOSE:To obtain a wafer prober, which can accurately conduct teaching work automatically, by providing a control section recognizing and arithmetically operating the dimensional dispersion and mean position of a probe group. CONSTITUTION:The images of a probe group 12 intruding from an image receiving port 15a are transmitted into an optical image pickup section 18 through a fiberscope 17. A television signal generating section 21 transmits an image sensor in the optical image pickup section 18 over a recognition processing section 22. Ranges A, B, C, D shown in circles represent visual fields for the object image receiving port 15a when an XYZTHETA table 2 is moved in a probe card 13 on a prober device base 7. An arithmetic control section 6 is interfaced to the pattern recognition processing section 22, integrates the positional data of these visual fields, and arithmetically operates the data to determine the XYZ mean position and revolution of the probe group 12, thus completing teaching work. An XYZTHETA table control unit 5 receives the command of the arithmetic control section 6, controls a motor amplifying section 3 in response to detecting outputs from a position detecting section 4 and controls the speed and positioning of the table 2. |
