| 摘要 |
PURPOSE:To measure the spectral characteristics of color filters precisely by constituting a color solid-state image pickup device by a color solid-state image pickup section consisting of a photoelectric conversion element, a scanning circuit and the color filter and an element section for evaluation composed of a photoelectric conversion element, a transfer gate electrode and the color filter. CONSTITUTION:A color solid-state image pickup section 20 is constituted of a first photoelectric conversion element, a first color filter 29 and a scanning circuit on a semiconductor substrate 21. An element section 20' for evaluation is constituted of a second photoelectric conversion element section, a second color filter 29', a diffusion layer 24 and a transfer gate electrode 25' on the same substrate 21. The second color filter 29' is manufactured through the same manufacturing process as the first color filter 29, and formed on an element having similar irregularities. The second photelectric conversion element section 20' is irradiated by spectrally diffracted beams, and charges are stored in the photoelectric conversion section 33' for a fixed time. Charges are led out by the transfer gate electrode 25' and collected to the diffusion layer 24, and led out by a metallic wiring 27'. The value of the charges is obtained, and the spectral characteristics of the second color filter 29' are measured. |
