摘要 |
PURPOSE:To greatly improve the ionizing efficiency and the ion selectivity by a method, in which a material to be ionized is optically excited in resonance from its ground state to the Rydberg state by irradiation of the synchrotron radiation light, while further putting it into an ionized state from the excitation state by impressing an electric field. CONSTITUTION:Magnesium vapor 10 is introduced into a container 1 from a gas introduction hole 1a. The synchrotron radiation light B3 is introduced into the container 1 from the generation part 3 of the synchrotron radiation light, while the magnesium vapor 10 is resonantly excited from the ground state to the Rydberg state. The voltage is impressed on the electrodes 5 and 6 respectively synchronizing with the introduction of the synchrotron radiation light, while an electric field is impressed on the magnesium vapor 10 in the Rydberg state and the magnesium vapor 10 is ionized due to the Stark effect. Further, the direct current voltage is impressed between the electrodes 6 and the sample stand 8a while the ionized magnesium vapor 10 is pulled out as the ion beam 9 made up only of magnesium ions, and radiated on the sample 8. |