GERAET ZUR MESSUNG VON UEBERDECKUNGSFEHLERN,申请号DE19853512064-传众专利搜索

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发明名称	GERAET ZUR MESSUNG VON UEBERDECKUNGSFEHLERN
摘要
申请公布号	DE3512064(A1)	申请公布日期	1985.10.24
申请号	DE19853512064	申请日期	1985.04.02
申请人	THE PERKIN-ELMER CORP.	发明人	A. BRUNNER,TIMOTHY
分类号	H01L21/30;G03F1/08;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G03F9/00;H01L21/68	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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