| 摘要 |
PURPOSE:To reduce the irregularity in the thickness of a resist film, by providing a resist receiving part arranged opposedly to a resist supply nozzle and recirculating a liquid at the time of non-dripping in such a state that both of them are closely contacted. CONSTITUTION:Resist is dripped from a nozzle 1 but a resist receiving part 8 is mounted to a supply nozzle 1 after dripping by a rotary drive system 9 and an up-and-down drive system 10 to form a resist flowline. Whereupon, a pump 3 is operated and the resist is always recirculated to keep the concn. thereof constant.
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