| 摘要 |
PURPOSE:To lay a magnetic thin film having a good characteristic on a dielectric film formed on a substrate without breaking the vacuum condition of a manufacturing device, by installing a conductive antenna which impresses a DC bias to the upper electrode for forming magnetic thin film. CONSTITUTION:A disk substrate 1 to be covered with a magnetic thin film is fitted to the upper electrode 7 by means of a substrate holder 6 and a conductive antenna 9 for impressing a DC bias voltage installed to the holder 6 is contacted with the substrate 1. It is constituted that the antenna 9 is contained in the holder by means of a prescribed wire when the upper electrode 7 is turned clockwise. At the time of forming the magnetic thin film, the upper electrode 7 is first turned clockwise and a dielectric film is formed on the substrate 1 by means of a target 15 without impressing the DC bias voltage. Then the upper electrode 7 is turned counterclockwise and the magnetic thin film is formed with another target 17 while the DC bias voltage is impressed. Therefore, the magnetic thin film having a good characteristic can be laid on the dielectric film without breaking the vacuum condition. |
