| 摘要 |
PURPOSE:To contrive to enhance the safety of an apparatus by preventing the mixing-in of the open air into a stock material tank, by preventing the pressure in the stock material tank reaching atmospheric pressure or less even when the temp. in the stock material tank is lowered to a room temp. CONSTITUTION:The stock liquid (e.g. glass stock liquid) received in a stock material tank 1 is heated and evaporated by a heater 3 to generate stock gas 7 which is, in turn, supplied to a reaction vessel 6 held under atmospheric pressure or more. In this stock material supply apparatus, gas not reacted with the aforementioned stock liquid (e.g., nitrogen) is supplied into the stock material tank 1 from a supply apparatus 16 so that the pressure in the stock material tank 1 does not reach atmospheric pressure or less when said pressure is lowered as the temp. is lowered when stock gas is not supplied. As a result, the mixing-in of the open air into the stock material tank is prevented and the enhancement of the safety of the apparatus can be achieved. |
