| 摘要 |
PURPOSE:To manufacture a foil of metal or metal comp. without utilizing plastic work by putting a base plate such as glass in a vacuum vessel, using metal difficult in the plastic work such as Mo and W as a target, making a film on the base plate with ion-plating or the like and peeling the film from the base plate. CONSTITUTION:The targets 9 made of metal difficult in plastic work such as Mo and W are provided to the inside of a vacuum vessel 1 and a base plate 5 made of glass is mounted on a holder 6 rotated with a motor 8 at the lower part. After the inside of the vacuum vessel 1 is exhausted from an exhaust hole 4, discharge gas such as Ar is introduced under low pressure from a gas inlet 2 by opening a valve 3 and the base plate holder 6 is discharged with an RF power source to subject the base plate 5 to reverse sputter etching. Then, DC electric power is supplied to the targets 9 from DC power source and the target metal is sputtered to form a film on the glass base plate 5. Thereafter, the film is taken out from the vacuum vessel and base plate from the glass base plate 5 and the thin foil of metal and metal comp. difficult in plastic work such as Mo and W is manufactured. |
