| 摘要 |
PURPOSE:To make an apparatus easy to operate, highly reliable and capable of performing a number of measurements in a short time, by conducting measurement automatically at a number of points after an object to be measured is set. CONSTITUTION:After an object 10 to be measured is mounted on a sample table 42 at a mounting position A, a driving motor 48 is started to move the object horizontally to a measuring position B and a sliding base 44 is fixed by a positioning block 54. Next, a detecting unit 14 is lowered by an air pressure cylinder 28, so as to make the fore end of a detector 12 contact with the curved surface of the object. When the unit 14 is lowered to a prescribed position, an integrated operation processor is driven to conduct measurement. The determination as to whether the result of measurement is acceptable or not is made by a method wherein the difference from a reference value at each measuring point is calculated, the mean square deviation of errors in the number of N is found and it is determined whether said deviation exceeds preset limits or not. When the deviation exceeds the limits, it is displayed in a display unit that the result is not acceptable, and the measurement is ended.
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