| 摘要 |
PURPOSE:To form a high-hardness film on the surface by placing Al or an Al alloy in a hermetic vessel, removing the remaining oxygen in the vessel, then heating the Al, activating the surface, introducing gaseous nitrogen, and generating glow discharge. CONSTITUTION:An anode plate 13 made of stainless steel is installed in a hermetic vessel 1, and an Al material or an Al alloy material 5 is placed on a base stand 2 as a cathode. The air in the hermetic vessel 1 is evacuated with a vacucum pump 3 to remove oxygen. Gaseous hydrogen is supplied while heating the inside of the furnace with 12, and then evacuated. Said process is repeated plural times to evacuate the remaining oxygen completely. A DC voltage is impressed between both electrodes 2 and 13 to generate electric discharge, and the Al 5 is heated by the impact of ions to a temp. at which Al is nitrified. Then the atmosphere in the hermetic vessel 1 is replaced with rare gases such as He, Ne, and Ar, and the electric discharge is generated to activate the surface of the Al 5. Subsequently, the inside of the hermetic vessel is replaced with NH3 or a gaseous mixture of N2 and H2, and the low discharge is applied to form an AlN layer having high hardness and excellent abrasion resistance on the surface of the Al 5.
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