| 摘要 |
PURPOSE:To provide the titled reflective film having high reflectivity to an electromagnetic wave in the X-ray region by forming a built-up films of organic compds. with a vertical dip method or vacuum deposition. CONSTITUTION:Silver stearate is placed on a boat made of tantalum to vauum- deposit said substance on glass which is optically ground. Meanwhile, a glass plate is ultrasonically washed with isopropyl alcohol, a buffer soln. of hydrofluoric acid and ammonium, and demineralized water, and then fixed to a supporting stand for a substrate in a device. The distance between the boat and the surface of the glass plate is regulated to 10cm. During vapor deposition, the glass plate is rotated at 100rpm along with the supporting stand, and further rotated on its axis at 6rpm to make the thickness of deposited film uniform. When the vacuum in the device reaches 1X10<-3> Pa, the boat is energized to vapor-deposit said substance. The variation in the fixed frequency of a quartz crystal resonator which is provided at the same height as the glass plate is fed back to the boat current to make the vapor deposition velocity constant. |
