发明名称 MANUFACTURE OF HIGH-DENSITY ORGANIC THIN FILM
摘要 PURPOSE:To obtain high density in an organic thin film, to reduce pinholes and to improve uniformity in film thickness, by using a Langmuir Blodgett's method. CONSTITUTION:For example, a magnetic recording layer 2 is formed on a disk substrate 1 for magnetic recording. On the upper surface of the recording layer 2, several layers of organic super-thin layers 3 are formed by using a monomer, which has a polymeric group in a molecule such as omega-tricosanoic acid, vinyl stearate or diacetylene derivative by a total Langmuire Blodgett's (LB) method. Thereafter the surface of the film is treated by plasma in a gaseous atmosphere or an energy beam is projected on the surface. Thus polymerization is performed.
申请公布号 JPS60208840(A) 申请公布日期 1985.10.21
申请号 JP19840065334 申请日期 1984.04.02
申请人 MATSUSHITA DENKI SANGYO KK 发明人 OGAWA KAZUFUMI
分类号 H01L23/28;H01L21/312 主分类号 H01L23/28
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