| 摘要 |
PURPOSE:To obtain accurately two-dimensional information corresponding to the shape of distance information on plural points, i.e. an object of measurement through single-time measurement by irradiating the object of measurement with light from a linear light source and photodetecting reflected light in two dimensions by an image sensor. CONSTITUTION:The displace measuring device consists of the linear light source 1 which irradiates the object X of measurement with beam light in a specific direction and the image sensor 3 which photodetects reflected light from the object X through a photodetection lens 2 at a specific angle theta0 to the irradiation direction of the beam light. Then, the light source 1 irradiates the object with the linear beam light which spreads within a specific range A and the sensor 3 consists of plural photodetecting elements S in two dimensions in its photodetection direction and slants at a specific angle thetaalpha to the image formation point surface of the lens 2. Consequently, a controller calculates the distance to the object X of measurement and information on its shape by triangulation on the basis of detection results of coordinates (i, j) of a elements S corresponding to a reflected light photodetection position on the sensor 3. |
