发明名称 X-RAY EXPOSING UNIT
摘要 PURPOSE:To maintain constantly the optimum conditions for the relation between the resolving power and the throughput, by setting the conditions for solar slits in accordance with desired resolving power. CONSTITUTION:A shutter 3 which is driven by a shutter switch 4 for setting an exposure time and one of solar slits 5a, 5b and 5c are placed along the X-rays path 2 from an X-ray source 1. The slits 5a, 5b and 5c are provided with a multiplicity of fine apertures and have different angular apertures with each other. The slits 5a, 5b and 5c are selected by an exposure control unit 11a. In such a manner, the optimum conditions for the relation between the resolving power and the throughput can be maintained constantly.
申请公布号 JPS60208830(A) 申请公布日期 1985.10.21
申请号 JP19840065257 申请日期 1984.04.03
申请人 CANON KK 发明人 OKUNUKI MASAHIKO
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/30 主分类号 G03F7/20
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