发明名称 ION BEAM GENERATOR
摘要 PURPOSE:To improve the ionization efficiency by irradiating light emitted from a synchrotron light emitting section onto material to be ionized thereby performing resonance light excitation of said material from the bottom energy state to Rydber condition. CONSTITUTION:Magnesium vapor 10 to be ionized is led into a container 1 while electrodes 5, 6 are provided to lead a light beam B3 of 1,625Angstrom emitted from a synchrotron light emitting section 3 between said electrodes 5, 6. Said beam B3 will resonance excite the vapor 10 from the bottom state to Rydberg condition while voltage is applied between saie electrodes 5, 6 synchronously in time to ionize the vapor 10 under Rydberg condition through Shutalk effect and taken out as an ion beam 9 composed only of magnesium under the voltage between the electrodes 6, 8a to be irradiated onto a specimen 8. Consequently, the ionization efficiency and the selectivity of ion can be improved considerably.
申请公布号 JPS60208039(A) 申请公布日期 1985.10.19
申请号 JP19840066899 申请日期 1984.04.02
申请人 MITSUBISHI DENKI KK 发明人 UEDA YOSHIHIRO;ONO KOUICHI;OOMORI TATSUO;FUJITA SHIGETO
分类号 H01J27/24;H01J37/08;H01L21/265 主分类号 H01J27/24
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