发明名称 ION BEAM GENERATOR
摘要 PURPOSE:To improve the ionization efficiency by irradiating two laser beams having different wavelength onto material to be ionized and forming a gas discharge producing section at the crossing section of beams and causing resonant light excitation. CONSTITUTION:Magnesium 10 to be ionized is led into a container 1 while two laser beams B1, B3 are led through the windows 3a, 3b to form a gas discharge producing section 15 in an ion producing space 4 at the crossing section to perform resonant excitation of vapor 10 into first exciting condition through 2,853Angstrom beam B1 while to perform resonant excitation into Rydberg condition through 3,859Angstrom beam. Thereafter, the vapor 10 is collided against electrons under the electric field to be produced synchronously with the laser oscillation between the electrodes 5, 6 and ionized to be taken out as an ion beam 9 composed only of magnesium ions and irradiated onto a specimen 8. Consequently, the ionization efficiency and the selectivity of ion can be improved considerably.
申请公布号 JPS60208035(A) 申请公布日期 1985.10.19
申请号 JP19840066895 申请日期 1984.04.02
申请人 MITSUBISHI DENKI KK 发明人 UEDA YOSHIHIRO;ONO KOUICHI;OOMORI TATSUO;FUJITA SHIGETO
分类号 H01J27/24;H01J37/08;H01L21/265 主分类号 H01J27/24
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