| 摘要 |
PURPOSE:To improve following properties by calculating a setter driving time on the basis of a real value of a driven setter speed obtained at the preceding sample in case of the 2nd sample or after. CONSTITUTION:In the 1st sample, the setter can be driven by only a half of a planned curve A because there are no data for the real driven setter speed. In the 2nd sample however, the lack of the driven variable at the 1st sample is also precisely compensated by using the data of the real driven setter speed measured at the 1st sample to driven a setter 21 up to a position coinciding with the planned curve A. In the 3rd sample or after also, the setter 21 is driven while considering the real value of the driven setter speed may be shifted from a specification value. Therefore, a driving curve C is formed along the planned curve A. Thus, the following property can be improved. |
