| 摘要 |
PURPOSE:To report abnormality by a simple constitution, by setting the amplification factor of a flow rate signal based on the deviation of paired flow rate data, increasing the abnormal index when the deviation of the paired flow data exceeds a specified value, and outputting an alarm signal. CONSTITUTION:A data-pair forming part 30 reads the flow rate data from an AD converter 22 and forms a pair of continuous flow rate data. A data check part 31 obtains the deviation of the paired flow rate data. When the deviation is outside a preset value, abnormality index processing is performed. When the deviation is within the preset value, it is determined that the data value is judged by the operation at the next stage. When an abnormal index processing part 32 receives the signal outside the preset value from the data check part 31, the abnormal index is increased and the abnormal index signal is sent out from an alarm processing part 33. A data-value judging part 34 averages the paired flow rate data, and the amplification factor of a variable amplifier 21 is changed by the output of the part 34. |
