| 摘要 |
PURPOSE:To enlarge the degree of freedom of planning, by providing a control means for controlling the atmospheric temp. of a liquid and a carrier. CONSTITUTION:An apparatus is put in a box 28 blocking said apparatus from the open air and the temp. of air in the box 28 blocked from the open air is controlled to control the atmospheric temp. of a liquid 10' and a carrier 11 at the time of film formation. In order to block the liquid 10' and the carrier 11 from the open air, the box 28 consists of heat insulating walls 26, 23 forming a double structure filled with a heat insulating material 22. The control of the temp. of air in the box 28 is performed by the air temp. controller 27 provided in the box 28. Further, a heater, a Peltier element and a fan are provided to the air temp. controller 27 and air in the box 28 is recirculated and can be heated or cooled. |
