| 摘要 |
PURPOSE:To provide the captioned device having a fast driving speed and accurate positioning capability by rotating a screw rod with operation of a pulse motor by a coarse driving signal, while allowing the screw rod to finely move forward and backward in the axial center direction with the operation of an electrostriction actuator by a finely driving signal. CONSTITUTION:A pulse motor 5 is driven for rotation each time a coarse driving signal i2 is inputted into a pulse motor driving circuit 15, whereby a sample table A is urged in the left direction at each rotation driving of the pulse motor. In addition, a finely driving signal i3 is inputted into a decision circuit wherein the signals i3 up to the 20th input are cancelled out while a digital signal i4, in responce to only the signal i3 inputted after the pulse motor 5 driving is complete is outputted from the decision circuit and inputted into a D/A converter circuit 17. The signal is converted to an analog signal i5 for extending the electrostriction element 9 of an electrostriction actuator 6. The signal i5 is then inputted into an electrostriction element driving circuit 18, and amplified therein, wherein prescribed voltage is applied to the electrostriction element 9 which is extended to drive a screw rod 2 and the sample table A to the left in a body. |
