| 摘要 |
PURPOSE:To perfectly separate semiconductor wafers from the transfer mechanism of carrier which will become dust generating source by forming a carrier system with a carrier which realize internal purified space and a joining means which joins such purified space and a joining means which joins such purified space while keeping the purified condition. CONSTITUTION:A wafer housing vessel 5 is provided on an all-direction carrier 1, a blower 2 is then provided to the ceiling of such vessel. The wind blowing downward is injected from an aperture provided at the bottom surface through an air exhaustion chamber 11 and it is then circulated to the blower 2 through a circulating duct 12 provided along the one side surface of vessel 5. Moreover, an air pot 3, a filter 4, a cassette 7 erecting a plurality of wafers 6 and a transfer apparatus 8 for moving said cassette to the right and left are provided between the blower 2 and the exhaustion chamber 11, and a shutter 9 is also provided in the opposite side of duct 12 while it is hermetically sealed with a packing 10. Thereafter, a joining means having the purified space 13 within the manufacturing apparatus in almost the same structure as the carrier 1 is opposed, the double shutter 19 and 20 are provided at the area facing to the shutter 9 and the cassette 8 is moved through such area. |
