| 摘要 |
PURPOSE:To improve accuracy by making uniform the pressure applied to a pellet by a plurality of probes by a method wherein the plurality of probes led out of a rectangular window provided on a card substrate is of the same length. CONSTITUTION:A window 22, shaped rectangular after the shape of a pellet 24, is provided in a card substrate 21. A plurality of probes 25 is led out of the window 22 and their ends are in contact with electrodes 26 of the pellet 24. All the probes 25 are of the same length and are installed oblique to a wafer dicing line 27. The end of a probe 25 contacts the diagonal of an electrode 26, providing a larger positional allowance for the probe 25. With the length of the probes 25 being equal, whether extending from the longer sides or shorter sides, each produces the same quantity of pressure. If follows therefore that there is no change in electric characteristics along the junctions between the probes 25 and electrodes 26. |
