| 发明名称 |
INHIBITING CORROSION OF ALUMINIUM METALLIZATION |
| 摘要 |
Bromine-containing plasma is utilized to inhibit corrosion of aluminum or aluminum alloy films which have been etched utilizing a chlorinated plasma. |
| 申请公布号 |
DE3266225(D1) |
申请公布日期 |
1985.10.17 |
| 申请号 |
DE19823266225 |
申请日期 |
1982.10.26 |
| 申请人 |
FAIRCHILD CAMERA & INSTRUMENT CORPORATION |
发明人 |
RADIGAN, KENNETH J. |
| 分类号 |
C23F4/00;C23C8/02;C23C8/36;H01L21/02;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):C23F11/02;C23C14/00;C23F1/00 |
主分类号 |
C23F4/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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