| 摘要 |
PURPOSE:To attain the automation of alignment, by detecting the center position of a target and that of laser beam from the image of laser beam containing the target image and driving a reflective mirror so as to bring positional deviation information to zero. CONSTITUTION:An optical system is constituted of a reflective mirror 1 having a reflective mirror driving part 7, a condensing lens 2, a target 3 and a camera 4 for simultaneously catching the image of the target 3 and the image of laser beam 6, and further equipped with an image memory 10, a target center detector 11 for calculating the center of the target image from the image memory 10, a laser beam center detector 12 for calculating the center of laser beam and a subtractor 13 for calculating the difference of the center position of the target and that of laser beam. The reflective mirror driving part 7 is driven so as to bring the difference output of the subtractor 13 to zero to set the center of laser beam to that of the target. By this mechanism, alignment can be electrically automated with necessary accuracy. |
