PRODUCTION OF INSULATING FILM

摘要

PURPOSE:To form a gate insulating film having excellent electrical characteristics and high performance with a capacity coupling type high-frequency glow discharge device by specifying the distance between electrodes. CONSTITUTION:A capacity coupling type high-frequency glow discharge device has a glow discharge chamber (a) and a high frequency electrode (b) and a substrate holder (c) disposed to face each other in said chamber and is so constituted that the distance (d) between both electrodes can be changed. Gas is supplied into the chamber through a port (e). The other parameter is changed and an insulating film is formed while the distance (d) between the high-frequency electrode (b) and the substrate holder (c) is maintained at <20mm. with the above- mentioned manufacturing device.