| 摘要 |
PURPOSE:To measure the straightness of a long distance easily by photodetecting two parallel laser light irradiated from a position close to one end of a stroke by semiconductor position detectors arranged close to the other end and on a machine and detecting the two-dimensional positions of the spots. CONSTITUTION:A laser head 1, a beam splitter 3 and a beam bender 4 are rigidly fixed on a fitting member 5 having high rigidity to form a laser light radiating device 6 and the 1st semiconductor position detector 10 is fitted to the machine 8 to be driven on a sliding surface 9 by an NC device (not shown in the figure). The device 6 and the 2nd semiconductor 12 are arranged close to the starting end of the stroke and a fitting board 11 fixed near the final end respectively. The detectors 10, 12 are arranged on parallel laser light pathes 7a, 7b from the splitter 3 and the bender 4 respectively. The two-dimensional displaced variable of the machine 8 is found out from the output of the detector 10 and the variation of the optical path 7a, i.e. 7b, is detected by the detector 12. |
