THREE-DIMENSIONAL ULTRASONIC MICROSCOPE

摘要

PURPOSE:To attain stereoscopic observation by coupling a stage mounting a base board and a sampling board unitedly with an arm forming a link means through a thin thickness part and arranging a driving means on the stage to constitute a sampling board positioning device. CONSTITUTION:The stage 12 mounting the base board 11 and the sampling board 1 is unitedly coupled with the arm 13 constituting the link means through the elastically bendable thin thickness part 14 to constitute an elastically deformed block and a piezo-electric element (not shown in figure) is abutted upon the stage 12. Voltage is applied to the piezo-electric element and the positioning device is constituted so that the stage 12 is slightly moved actually in parallel with the base board 11. A convergent beam from a transmitting transducer 3 consisting of a piezo-electric film 5 and a lens 7 is made incident on a sample 2 set up on the sample board 1 mounted on the stage 12 through fluid 9 and the transmitted ultrasonic wave is converted into an electric signal by a receiving transducer 4 consisting of a lens 8 and a piezo-electric film 6 through fluid 10. The electric signal is processed by an electronic computer or the like to form the image of the sample 2.