| 摘要 |
PURPOSE:To prevent a diaphragm from excessive pressure and to detect the pressure highly accurately by arranging a pressure receiving plate in the front of the other side of the diaphragm mounting a piezo-electric oscillator on its one side at an interval and forming a sealed space. CONSTITUTION:The whole peripheral edge of the diaphragm 2 fixing the pressure vibrator 1 is airtightly adhered by the upper end part of a supporting member 304 and a fixing member 305 and the pressure receiving plate consisting of a metallic thin plate or the like is mounted on the upper end surface of the member 305 and tightly fixed by a fixing member 306. In the pressure receiving part 10, a pleat-like bent part (a) is formed on the peripheral part near the outer periphery and terminals 4-6 are connected to a pressure detecting circuit. Pressure from a pressure leading hole 302 is transmitted to the diaphragm 2 through the pressure receiving plate 10 and the sealed space 11 and the pressure change is transmitted to the detecting circuit. Even if the pressure medium is fluid, highly accurate detection of the pressure change can be attained without oscillation stop or the like. |
