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发明名称
VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON BELICHTUNGSMASKEN FUER DIE HERSTELLUNG EINES AUFZEICHNUNGSTRAEGERS MIT EINER AUFZEICHNUNG HOHER INFORMATIONSDICHTE.
摘要
申请公布号
AT15949(T)
申请公布日期
1985.10.15
申请号
AT19820107082T
申请日期
1982.08.05
申请人
DR. JOHANNES HEIDENHAIN GMBH
发明人
MICHEL, DIETER, ING. GRAD.
分类号
G03B27/32;(IPC1-7):G03B27/32
主分类号
G03B27/32
代理机构
代理人
主权项
地址
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