发明名称 X-RAY EXPOSURE DEVICE
摘要 PURPOSE:To unnecessitate the use of a pure water making device, to simplify even a countermeasure against insulation and to improve heat shielding efficiency by combining a deflection electrode with a heat shielding plate, bringing the deflection electrode to grounding potential and applying positive high voltage to a target. CONSTITUTION:A heat shielding plate 4' combining a Wehnelt 1 and a deflection electrode is brought to grounding potential, and positive high voltage is applied to a target 3. A filament 2 is heated by a filament power supply 6 under the state to generate electron rays 7. Electron rays 7 are accelerated toward the target 3 while being focussed by the action of the Wehnelt 1, and an orbit thereof is bent by the deflection electrode 4' and electron rays are projected to the desired position of the target 3 to generate X-rays 8. Heat generated at the same time as X-rays 8 are generated is cooled by cooling pipes 9 disposed to the heat shielding plate 4' acting as the deflection electrode in combination.
申请公布号 JPS60202935(A) 申请公布日期 1985.10.14
申请号 JP19840058357 申请日期 1984.03.28
申请人 CANON KK 发明人 KARIYA TAKUO;IWAMOTO KAZUNORI
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/30 主分类号 G03F7/20
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