| 摘要 |
PURPOSE:To enable tetrode-type analysis and magnetic-field-type analysis to be arbitrarily performed by one device by installing a tetrode-type mass spectrograph and a magnetic-field-type mass spectrograph on both sides of a common ion source and in a common case. CONSTITUTION:Parts 3 and 4 for forming a primary ion beam to be irradiated upon a sample 1, a magnetic-field-type mass-spectrographic part (M) and a tetrode-type mass-spectrographic part (Q) are installed in a vacuum case (W). The parts (M) and (Q) are installed in independent chambers which are located on both sides of the beam formation parts 3 and 4. Diaphragms in these chambers are used as secondary-ion-leading-out electrodes 5 and 6 and also shutters 7 and 8 are installed, thereby constituting a secondary ion mass spectrometer. By performing switching between the shutters 7 and 8, this device can be used for any of high-speed mass scanning analysis, high-resolution mass spectrography, high-resolution analysis for low mass numbers and high mass numbers and soft- vacuum mass spectrography although only low resolution can be achieved by the analysis. |
