| 摘要 |
PURPOSE:To enable to inspect a semiconductor wafer from the multiple directions, and to enable to increase efficiency of the inspection by a method wherein the titled device is so constructed as to be enabled to vary the rotation and the inclining angle of a semiconductor wafer stage linked to a joystick by operating the same. CONSTITUTION:A semiconductor wafer 4 carried out by a conveyer 2 is stopped at the position of a semiconductor wafer stage 3 for the hours necessary for a test. The mechanism of the semiconductor wafer stage is supported by a supporting base 5, and a ball bearing mechanism 6 and a pulley 7 are provided between the supporting base and the semiconductor wafer stage thereof. While a joystick mechanism to operate the semiconductor wafer stage thereof is provided, the ball bearing mechanism 8 and the pulley 9 thereof are linked respectively to the ball bearing 6 and the pulley 7, and the operation of the semiconductor wafer stage mechanism is executed according to the operation of a handle 10. An illuminator 13 projects light from an oblique direction, and the external appearance of the semiconductor wafer is inspected according to the reflected light from a crack or a foreign matter deposited on the semiconductor wafer. |
