| 摘要 |
PURPOSE:To make a semiconductor wafer conveyable without any damage to it, by rolling an eccentric pulley on one side of conveying belts being intercrossed, while constituting a point on the other side conveying belt so as to move up and down in describing a curve similar to a sine curve. CONSTITUTION:A conveying belt installed along a conveying passage in an A direction is drived into the upstream side 4a and the downstream side 4b, and each of them is rolled on each pulley 3, while a conveying roller 7 is installed in an interseting point where both these belts 4a and 4b are separated away. On the other hand, a conveying device 8 in a B direction is installed as being intersected with this conveying roller. This conveying device 8 rotates a conveying belt being rolled on between double pulleys 9b and 9b' by a driving motor 10, while it is constituted so as to a wave-motion belt 4e being rolled on between more two double pulleys 9b' and two eccentric pulley 9d. And, the wavemotion belt 4e is made to describe a curve similar to a sine curve whereby a wafer is conveyed after changing its direction from the A direction to the B direction. |
