MAGNETO-RESISTANCE EFFECT ALLOY FILM AND ITS PRODUCTION

摘要

PURPOSE:To produce a magneto-resistance effect alloy film having uniaxial anisotropy and small anisotropic magnetic field by depositing a specifically composed Ni-Co-Fe alloy on a substrate while switching and impressing alternately orthogonal external magnetic fields thereto. CONSTITUTION:An Ni-Co-Fe alloy having a prescribed compsn. is loaded into a heating source 2 for vapor deposition and is heated to evaporate so as to be deposited on a substrate 3 supported by a substrate holder 4 and heated to about 200-400 deg.C by a heating source 7 in a vacuum chamber 1 in which about 5X 10<-6>Torr pressure is maintained. Helmholtz coils 5 are disposed on the right and left side faces and the front and rear surfaces of the substrates 3 to impress alternately and repeatedly external magnetic fields of prescribed frequency in orthogonal directions within the deposition on the substrate 3. The magneto- resistance alloy film consisting of the compsn. Ni1-x-yCoxFey, 0.1<=x+2y<=0.5 and having uniaxial anisotropy, a large ferromagnetic magneto-resistance effect and <=20Oe anisotropic magnetic field is thus obtd.