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发明名称
Verfahren und Einrichtung zum opto-elektronischen Pruefen eines Flaechenmusters an einem Objekt
摘要
申请公布号
DE3347645(C1)
申请公布日期
1985.10.10
申请号
DE19833347645
申请日期
1983.12.30
申请人
DR.-ING. LUDWIG PIETZSCH GMBH & CO, 7505 ETTLINGEN, DE
发明人
PIETZSCH, LUDWIG, DR.-ING., 7500 KARLSRUHE, DE;OVERLACH, KNUD, DR.-ING.;SENGER, DETLEF, DR.-ING., 7505 ETTLINGEN, DE;BREUNIG, WALTER, DIPL.-ING., 7500 KARLSRUHE, DE
分类号
G06T1/00;G06T7/00;(IPC1-7):G01N21/88;H01L21/66
主分类号
G06T1/00
代理机构
代理人
主权项
地址
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