| 摘要 |
<p>PURPOSE:To contrive to heat effectively the deionized water by a method wherein an inert gas is supplied to a deionized water through a sheathed pipe made of a inert material into which an electric heating pipe is inserted. CONSTITUTION:A coil-shaped heater 7 is arranged in a tank 1 of a heating device. The heater 7 is formed as follows; a protecting pipe made of glass fiber is inserted into a sheathed pipe 8 made of carbon fluoride resin and a coil-shaped electric heating pipe 10 is inserted into the protecting pipe. An inert gas supply pipe 12 is connected to a sheathed pipe at the lower end of the heater 7, the inert gas is filled in the sheathed pipe. Therefore, even when a hole is bored through the sheathed pipe, only the inert gas flows out, a deionized water is prevented from pollution. Thereby, the thickness of the sheathed pipe can be made thinner, accordingly, the heating performance can be improved.</p> |
