| 摘要 |
Capacitive pressure and temperature sensing devices for use at cryogenic temperatures are provided utilizing a quantum ferroelectric pyrochlore ceramic material as the dielectric. The ceramic material has the formula: (Cd1-xMx)2(Nb1-yM'y)2O7 where M is Pb, Ca, Sr, Ba, or mixtures thereof; where M' is Ta, Sb, or mixtures thereof; and where x and y are numbers in the range of from 0 to 1. M and M' are chosen such that the pressure sensing device uses a ceramic with a nearly temperature independent dielectric constant while the temperature sensing device uses a ceramic with a strongly temperature dependent dielectric constant. The sensors may comprise multi-layered capacitive devices, and may be combined into a single temperature and pressure sensing device.
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