| 摘要 |
PURPOSE:To enhance resolution, storage stability, etc., by incorporating gamma-aminopropyltrihydroxysilane dehydration condensate in a photosensitive compsn. contg. a water-soluble polymer and a bisazide type photocross-linking agent. CONSTITUTION:The present photoresist compsn. having good resolution and superior adhesion is prepared by mixing about 1-30pts.wt. of a bisazide type photocross-linking agent, such as 4,4'-diazidostilbene-2,2'-disulfonic acid or its salt, with 100pts.wt. of a water-soluble polymer, such as polyacrylamide, polyvinylpyrrolidone, or gelatin, to prepare a photosensitive compsn., and incorporating gamma-aminopropyltrihydroxysilane dehydration condensate represented by the formula (n is an integer of 2-20) in this photosensitive compsn. in an amt. of 0.01- 20pts.wt. per 100pts.wt. of the water-soluble polymer. |
