| 摘要 |
PURPOSE:To form a highly pure, dense polyimide film on a substrate in good adhesion, by vaporizing starting materials for a polyimide in vacuum and polymerizing them on the substrate. CONSTITUTION:A substrate 3 is set on the lower side of a holder 4 within a treatment chamber 1 (numeral 5 is a heater). Each vaporization tube 6 is filled with a starting material for a polyimide (sign a is pyromellitic dianhydride, b is 4,4'-diaminodiphenyl ether, and 7 is a heater). While the pressure in the treatment chamber 1 is kept at about 1X10<-5>Torr (numeral 2 is a vacuum system), the substrate 3 and the starting materials are heated to a predetermined temperature, and a shutter 10 is opened to deposit the vaporized starting materials on the substrate 3 and to polymerize them into a polyimide film.
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