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发明名称
摘要
申请公布号	JPS60151132(U)	申请公布日期	1985.10.07
申请号	JP19840039292U	申请日期	1984.03.19
申请人		发明人
分类号	H01L21/60;H01L23/48;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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