| 摘要 |
PURPOSE:To cool a heated part in a vacuum vessel in a short time without exerting any influence on other part by filling cooling gas into the vacuum vessel to a desired pressure. CONSTITUTION:A valve 16 is opened to introduce cooling gas into a vacuum vessel 13 for plasma CVD or other process to about 500-600Torr pressure. A valve 17 is then opened, and while exhausting the cooling gas in the vessle 13, cooling gas is introduced through the valve 16 so as to keep said pressure. The gas in the vessel 13 is exchanged, the heat of a heated part in the vessel 13 is efficiently absorbed in the introduced gas, and the gas is exhausted. |
