| 摘要 |
PURPOSE:To obtain the small-sized, inexpensive surface inspecting device by arranging plural diodes successively and inspecting the surface of a body to be inspected only by making a linear scan. CONSTITUTION:Laser light radiated by a light source 10 constituted by arranging plural laser diodes successively is converged by a cylindrical lens 12 to illuminate a linear area P' on a wafer 4 on a rack 7 vertically. Then, optical axis 16a and 16a are set symmetrically about a perpendicular H to the laser-irradiated part so as to inspect whether there is laser light scattered in the area P', and photoelectric elements 8-1 and 8-3, and 8-2 and 8-4 are arranged alternately on the optical axes 16a and 16a. Consequently, the laser light is detected to the overall length of the linear inspected area P'. Further, a cylindrical lens 16 is provided on the optical axes 16a and 16a respectively to converge the scattered light on the photoelectric detecting elements 8-1-8-4. Thus, plural inexpensive laser diodes are provided successively to illuminate the linear area P'. Therefore, the small-sized, inexpensive surface inspecting device is obtained. |
