发明名称 CHARGED PARTICLE BEAM EXPOSURE
摘要 PURPOSE:To restrict the generation of a section with a side less than the minimum image width from being set up while minimizing the total number of sections of exposed figures by a method wherein a section set up region is provided with new sectional data informations while a part of the segments parallel to the first coordinate axis is erased to set up the other segments parallel to the second coordinate axis. CONSTITUTION:The segments IJ, K1L and ON1 parallel to Y axis are set up successively to set up four sections by means of sectioning a trapezoid K1LN1O by a segment N1N2 parallel to X axis. A triangular section NN1M is provided with the data on the adjoining sections K1N2N1O and N2LN1. The vertex N1 is held in common by said three sections. When the side N1O of section K1N2N1O and the side NN1 of section NN1M are compared with each other, if the difference NO exceeds the minimum picture image width, the segments NN1 and N1N2 are erased to set up a new segment NN3 parallel to X axis obtaining new sections K1N3NO and N3LM. Through this sectional renewal, total number of sections may be reduced restricting a side with dimension not exceeding the minimum image width from being set up.
申请公布号 JPS60196939(A) 申请公布日期 1985.10.05
申请号 JP19840053212 申请日期 1984.03.19
申请人 FUJITSU KK 发明人 NAGATA TAKEO;NAKAYAMA NORIAKI
分类号 G03F7/20;H01L21/027;(IPC1-7):H01L21/30 主分类号 G03F7/20
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