| 摘要 |
PURPOSE:To form a magnetic layer film having good bondability on the surface of a driven shaft without using an adhesive by depositing a thin film by a cluster ionized beam method with a thin film on a magnetic layer secured on the outer periphery of the driven shaft. CONSTITUTION:A magnetic metal 12 to be deposited is charged in a crucible 10, a vacuum tank 8 is evacuated by a vacuum evacuating unit 9, and heated by a filament 13. The metal 12 becomes metallic vapor, and injected from a nozzle hole 11. The vapor of cluster state is collided with thermion 15 emitted by the leading electrode 16, partly ionized to become cluster ions 20, accelerated by an electric field formed between an accelerating electrode 19 and the electrode 16, collided together with neutral cluster 21 with the driven shaft 1 to form a thin film on the shaft 1. The shaft 1 is rotated by a rotating unit 23, and the portion unnecessary to be deposited is masked by a masking material 22. |
