摘要 |
PURPOSE:To obtain a microminiature and inexpensive constant output semiconductor laser element by forming a semiconductor layer, a drive circuit, a light spectral analyzer and a light power detector on a ferrodielectric substrate for foring a photoconductive waveguide. CONSTITUTION:Partial step is formed on an insulating substrate 1, and a laser diode 2 is arranged. The laser output is led by a photoconductive waveguide 3 formed of a thin film into a light spectral analyzer 4. The waveguide 3 is formed by diffusing an impurity such as Ti in the substrate 1 of LiNbO3. Part of the laser output is fed through the waveguide to a photoreceptor 5 formed of a photodiode. The photoreceptor 5 transmits an electric signal is response to the received light amount to a controller 6 to control the laser output light to be always at constant level. The elements are formed by using a semiconductor IC manufacturing technique to determine the positions of the elements in high accuracy. |