| 摘要 |
PURPOSE:To form a ceiling in reduced height of a chamber of be installed while positions of heating surface body and wafer holder are not changed by suspending a wafer holder with a rope and guiding the rope laterally at the specified upper position of aperture in order to move it in the direction of tension. CONSTITUTION:A wafer holder 4 is coupled to a rope 14 and is suspended, the rope 14 extended upward is guided laterally through a pulley 15 and is wound by a winding mechansim 16. The wafer holder 4 is loaded to or unloaded from a heating chamber 3 by opening caps 2, 11 as indicated by the chain lines, taking up or rewinding the rope 14 with the winding mechanism 16 and thereby moving upward of downward the wafer holder 4. The specified position of wafer holder 4 is almost at the center of furnace core tube 1 within the heating chamber 3 or at the upper part of opened cap 11, namely at the position (a) indicated by another two-dotted chain line outside the heating chamber 3. |
